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quinta-feira, 6 de novembro de 2008

Method of manufacturing piezoelectric ceramics

The present invention provides piezoelectric ceramics having a thickness of 100 μm or less, surface flatness of 20 μm or less and maximum surface uneveness of 3 μm or less in arbitrary surface region, wherein in-plane variation in dielectric constant is 5% or less of an average dielectric constant. The piezoelectric ceramics are applied to an actuator used for a painting head because of small surface flatness and less in-plane variation in piezoelectric constant.
( United States Patent 7244389 )
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